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发明授权
CN100594589C 用于分批式反应室的加热装置及其加热方法 失效 - 权利终止

用于分批式反应室的加热装置及其加热方法
摘要：
本发明提供一种用于分批式反应室的加热装置，其中包括多个加热器的加热器群沿着反应室的周边重复布置，每个加热器具有温度控制部件、施压线、一对第一及第二加热单元，所述成对的第一和第二加热单元彼此分隔并用作反应室的加热体；其中每对第一及第二加热单元的总长度是固定的，每个第一加热单元具有不同的长度，每个第二加热单元具有不同的长度。
摘要（英）：

The invention provides a heating apparatus for a batch-type reaction chamber, in which a heater party including a plurality of heaters is arranged repeatedly along with a circumference of the reactionchamber, wherein each of the heaters has a temperature controlling part, a voltage applying line and a pair of a first and a second heating units, the pair of the first and the second heating units being separated from each other and serving as heating bodies for the reaction chamber and wherein the sum of the length of each pair of the first and the second heating units is fixed, each of the first heating units not having a same length and each of the second heating units not having a same, is provided.

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