中科微点-全球专利检索

  1. Login
  2. Sign Up
Invention Grant
CN101104791B 铈系研磨材料及其原料 失效 - 权利终止

铈系研磨材料及其原料
Abstract:
本发明提供具有发生损伤更少等优良研磨特性、研磨速度更高的铈系研磨材料。该铈系研磨材料作为稀土类氧化物至少含有氧化铈(CeO2)、氧化镧(La2O3)及氧化钕(Nd2O3)，并含有氟元素(F)，其总稀土类氧化物换算重量(TREO)为90wt％以上，同时，TREO中氧化铈所占重量比(CeO2/TREO)为50wt％～65wt％，并且TREO中氧化钕所占重量比(Nd2O3/TREO)为10wt％～16wt％。使用这样的铈系研磨材料能迅速得到研磨损伤发生较少的研磨面。
Abstract(English):

A cerium-based polishing material which comprises cerium oxide (CeO2), lanthanum oxide (La2O3) and neodymium oxide(Nd2O3), as rare earth element oxides, and also fluorine (F), characterized in that ithas a proportion in weight of the total rare earth elements in terms of oxide (TREO) of 90 wt % or more, a proportion of the weight of cerium oxide in the weight of the total rare earth elements in terms of oxide (CeO2/TREO) is 50 to 65 wt %, and a proportion of the weight of neodymium oxide in the weight of the total rare earth elements in terms of oxide (Nd2O3/TREO) is 10 to 16 wt %. The cerium-based polishing material has excellent polishing characteristics such as the reduction in the generation of flaws and also exhibits enhanced polishing speed.

Public/Granted literature
Patent Agency Ranking
0/0