The utility model relates to a fabrication method of micro array grating which is fully matched with circular and annular beam aperture, which is characterized in that the number N of sub-aperture separated on the entire beam aperture is determined according to the principle of equal area of various sub-apertures; the expected spot array distribution is set, the spot array has N spots in total, the N expected spot arrays are corresponding to the N sub-apertures; the both directions space cycle or sawteeth depth of the two-dimensional array grating in each sub-aperture is designed according tocorresponding relation, zigzag phase grating with the structure is fabricated in each sub-aperture, the spot arrays of a square structured arrangement is formed by converging with the combined lens or lens group. The utility model has the advantages that the circular, annular aperture, even arbitrary shape beam aperture in theory can be fully matched, and the spot array still has a square structured arrangement, thereby solving the problem that the technology of the zigzag phase grating array can not be applied in practice, improving the efficiency of the zigzag phase grating production, and facilitating mass production.