The invention discloses a method to enhance the sputtering coating ion beam irradiation in the membrane plating technical field. The method includes following steps: (1) a radio frequency coil internally arranged is placed in front of a base plate in a membrane plating chamber, so superimposed plasmas are produced near the base plate; (2) the external surface of the radio frequency coil is completely insulated; (3) radio frequency energy is input into the radio frequency coil to heat the coil, and then the coil is cooled down; (4) the power of the input radio frequency is adjusted, so as to control the ion beam density of the irradiation base plate and adjust the ion beam irradiation effect in the plating membrane. In the method of the invention, the ion beam of the irradiation base plateis not provided with a high-energy tail, the density and the energy of the ion beam can be adjusted independently, the radio frequency power can be as high as thousands of watts, and no pollution is caused to the plasmas in the plating chamber.