A diamagnetic susceptive mass micro-accelerator with cylindrical and multi-ring axially and radially magnetized permanent magnet in the field of a micro-electro-mechanical system is composed of an upper stator, a rotor and a lower stator, wherein a cylindrical and a multi-ring axially magnetized permanent magnet in the upper and the lower stators provide suspension force and lateral stabilizing force to the diamagnetic rotor to achieve control-free self-stabilized initial levitation and suspension. Meanwhile, the axial rigidity, the lateral rigidity and the impact resistance of the micro-accelerator can be improved by axial detection of the upper and the lower stators, the lateral detection of a feedback electrode and the lower stator and the electrostatic force between the feedback electrode and the rotor, thus enhancing stabilization and suspension performance and lowering the initial levitation process and the initial levitation control difficulty of the rotor. Accordingly, the micro-accelerator can achieve self-stabilization, less power consumption, convenient implementation and small size, and can detect three axial accelerations in X, Y and Z axes and two angular accelerations around the X and the Y axes without complex control mechanism.