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发明授权
CN101263242B 真空成膜装置以及真空成膜方法 有权 转让

真空成膜装置以及真空成膜方法
摘要：
在将设置有工件的工件室侧的第二模具与设置有用于进行真空成膜的目标的目标室侧的第一模具进行合模，在上述工件上进行真空成膜的情况下，可缩短真空成膜工序所需的时间、降低成本，在设置了用于进行真空成膜的目标的目标室(7b)侧的成膜用模具(7a)的开口端设置挡板装置(13)，该挡板装置(13)具有开设了连通孔(19a、20a)的第一、第二支撑板(19、20)，和设置在两板(19、20)之间、对上述连通孔(19a、20a)进行开闭的挡板(17)，在上述合模后开放挡板(17)，在成模(2a)后，在脱模前的阶段封闭挡板(17)。
摘要（英）：

This invention provides a vacuum film forming apparatus that, in subjecting a second mold on the side of a work chamber in which a work is placed, to mold matching to a first mold on the side of a target chamber in which a target for vacuum film formation is placed, followed by vacuum film formation on the work, can shorten the time necessary for the step of vacuum film formation and can reduce the cost. A shutter device (13) is provided on an opening end of a mold (7a) for film formation on the side of a target chamber (7b) in which a target for vacuum film formation is placed. The shutter device (13) comprises first and second support plates (19, 20) having continuous holes (19a, 20a) and a shutter (17) disposed between both the plates (19, 20) for opening/closing the continuous holes (19a, 20a). The shutter (17) is opened after the mold matching and is closed in a stage after the formation of a film (2a) and before mold release.

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