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发明授权
CN101268212B 原料供给装置以及成膜装置 有权

原料供给装置以及成膜装置
摘要：
本发明提供一种原料供给装置，是向成膜装置供给使固体原料升华的气体原料的原料供给装置，其特征在于，包括：内部保持所述固体原料的原料容器；设置在所述原料容器的第一侧的第一加热单元；设置在所述原料容器的第二侧的第二加热单元；第一温度控制单元，进行第一处理，控制所述第一加热单元以及所述第二加热单元，使所述第一侧的温度比所述第二侧的温度高，以使所述固体原料在所述第一侧升华；以及第二温度控制单元，进行第二处理，控制所述第一加热单元以及所述第二加热单元，使所述第二侧的温度比所述第一侧的温度高，以使所述固体原料在所述第二侧升华。
摘要（英）：

The invention provides a raw material feeding device for feeding a gaseous raw material formed by the sublimation of a solid raw material into a film formation system, characterized by comprising a raw material container for holding the solid raw material therein, the first heating means placed on the first side of the container, the second heating means placed on the second side thereof, the first temperature control means for conducting the first management of controlling the first and second heating means so as to make the temperature of the first side higher than that of the second side and thereby sublimate the solid raw material on the first side, and the second temperature control means for conducting the second management of controlling the first and second heating means so as to make the temperature of the second side higher than that of the first side and thereby sublimate the solid raw material on the second side.

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