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CN101297218B 用于检测电子束的暴露的导体件系统和方法 有权

用于检测电子束的暴露的导体件系统和方法
摘要：
披露了一种用于检测沿路径产生的电子束(106)强度的检测器(104)。一种示例性的检测器包括连接到支撑件(112)的暴露的导体件(105)，该支撑件(112)配置为将该暴露的导体件(105)设置于电子束(106)路径内；与该暴露的导体件(105)隔离的接地导体件(107)，该导体件(107)部分围绕该暴露的导体件(105)，以形成等离子罩，该等离子罩具有窗口，该窗口至少设置在该电子束的方向上。
摘要（英）：

A detector (104) is disclosed for sensing an intensity of an electron beam (106) generated along a path. An exemplary detector includes an exposed conductor (105) attached to a support (112) which is configured to locate the exposed conductor (105) within a path of an electron beam (106); a grounded conductor (107) isolated from the exposed conductor (105), the grounded conductor (107) partly surrounding the exposed conductor (105) to form a plasma shield having a window positioned at least in a direction of the electron beam path.

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