Provided is a device for generating map data of a probe tester and a method, comprising a data generating module, for generating original data of a wafer by using a wafer information file, wherein the file includes a plurality of characteristics of the wafer; an error detecting module, for detecting map error between a first coordinate of a chip and a second coordinate of the map chip in the original data corresponding to the chip on the wafer; a calibrating module, for computing correction, for compensating the map error between the first coordinate of the chip and the second coordinate of the map chip; and a coordinate correcting module, for correcting the coordinate of the map chip in the original data according to the correction. Therefore, no additional manual operation is required based on the original data related to the wafer to generate precise map data.