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CN101329511B 化学放大型正性抗蚀剂组合物 失效 - 权利终止

化学放大型正性抗蚀剂组合物
摘要：
一种化学放大型正性抗蚀剂组合物，其包含(A)树脂和(B)至少一种酸生成剂，所述的(A)树脂包含：(i)由式(I)表示的聚合单元，其中R7表示氢原子等，R8表示C1-C4烷基，p表示1至3的整数，q表示0至2的整数；(ii)选自由式(II)表示的聚合单元和由式(IV)表示的聚合单元中的至少一种聚合单元，在式(II)中，R1表示氢原子等，R2表示C1-C8烷基，并且环X表示脂环烃基，在式(IV)中，R3表示氢原子等，R4和R5独立地表示氢原子等，R10表示C1-C6烷基等；以及(iii)由式(III)表示的聚合单元，其中R3、R4和R5与上述定义相同，E表示二价烃基，G表示单键等，Z表示羰基等，并且L表示蒽基等。
摘要（英）：

A chemically amplified positive resist composition comprises (A) a resin which comprises (i) a polymerization unit represented by the formula (I): wherein R<7> represents a hydrogen atom etc., R<8> represents a C1-C4 alkyl group, p represents an integer of 1 to 3, and q represents an integer of 0 to 2, (ii) at least one polymerization unit selected from a group consisting of a polymerization unit represented by the formula (II): wherein R<1> represents a hydrogen atom etc., R<2> represents a C1-C8 alkyl group and ring X represents an alicyclic hydrocarbon group, and a polymerization unit represented by the formula (IV): wherein R<3> represents a hydrogen atom etc., R<4> and R<5> independently represents a hydrogen atom etc., R<10> represents a C1-C6 alkyl group etc., and (iii) a polymerization unit represented by the formula (III): wherein R<3>, R<4> and R<5> are the same as defined above, E represents a divalent hydrocarbon group, G represents a single bond etc., Z represents a carbonyl group etc. and L represents an anthryl group etc., and (B) at least one acid generator.

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