The invention discloses chemical machinery grinding equipment which comprises a casing, a rotating table, a grinding pad, a flushing device and a main control computer, and also a moisture preservation device, wherein, the moisture preservation device is provided with a flow pipe connected with a deionized water pipe, the flow pipe is installed around the inner upper edge of the casing, the flow pipe is provided with a switch to control the open or close state, and a plurality of openings are formed on the side walls of the of the flow pipe facing to the periphery of the rotating table. The invention also discloses the corresponding chemical machinery grinding method. By adopting the chemical machinery grinding equipment and the chemical machinery grinding method, after the grinding is stopped, the moisture preservation can be performed on the periphery of the rotating table of the equipment, and the scratch on the surface of the liner caused by the splashing grinding lubricant after drying can be reduced.