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发明授权
CN101401198B 用于玻璃基板的静电吸引设备和吸引和释放玻璃基板的方法 失效 - 权利终止

用于玻璃基板的静电吸引设备和吸引和释放玻璃基板的方法
摘要：
本发明公开了一种静电吸引设备和一种能够可靠吸引和快速释放玻璃基板的吸引/释放方法。根据玻璃基板的物理性质获得用于吸引玻璃基板的吸引力。除了获得用于获得吸引力所要求的吸引电压(Vc(t))之外，也获得了用于保持吸引状态的保持电压(Vh(t))和用于释放玻璃基板的释放电压(Vr(t))(S1到S7)。吸引时间周期(tc)被实际测量，并且如果此测量的时间不同于预设吸引时间(t1)，根据实际测量的吸引时间周期(tc)重新计算保持电压(Vh(t))和释放电压(Vr(t))(S8到S11)。
摘要（英）：

The invention discloses an electrostatic attraction apparatus and an attracting/releasing method capable of reliably attracting and quickly releasing a glass substrate. An attraction force for attracting a glass substrate is obtained according to the physical properties of the glass substrate. In addition to obtaining an attraction voltage (Vc(t)) required for obtaining the attraction force, a holding voltage (Vh(t)) for holding an attraction state and a release voltage (Vr(t)) for releasing the glass substrate are also obtained (S1 to S7) Attraction time period (tc) is actually measured and if this measured time is different from a preset attraction time (t1), the holding voltage (Vh(t)) and the release voltage (Vr(t)) are recalculated according to the actually measured attraction time period (tc) (S8 to S11).

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