The invention relates to a workpiece chuck structure, which is provided with an installing section, an extending section and a bearing section, wherein the extending section is joined with the installing section and bends and extends, the bearing section is joined with the extending section and provided with a bearing surface and a plurality of grooves on the bearing surface. When the workpiece chuck holds a workpiece to be processed to carry out sputtering technology and films are formed respectively on the surface of the workpiece to be processed and the bearing surface of the workpiece chuck, the arrangement of the grooves can ensure the film formed on the bearing surface not to be peeled off and fall on the surface of the workpiece to be processed, so as to improve the qualification rate of the sputtering technology.