Provided is a substrate transfer apparatus which can perform stable and highly accurate transfer without making configuration complicated. A substrate transfer apparatus (30) is provided with a multijoint arm (31) whose one end is arranged on a base and the other end connected to a substrate supporting hand (32); a linear guide (36) for guiding rectilinear movement of the hand (32); and a belt driving mechanism (38) for moving the hand (32) along the guide rail (37a) of the linear guide (36). The substrate transfer apparatus (30) having such configuration supports a load which operates to thehand (32) by the multijoint arm (31), and ensures rectilinear transfer performance of the hand (32) by the linear guide (36). Therefore, since a special mechanism for passing through a dead point is not required, the configuration is prevented from being complicated. Furthermore, since the direct load is not operated to the linear guide (36), high transfer accuracy can be obtained.