The invention discloses a thermocouple with micron scale or nanometer scale tip curvature radius and a manufacturing method thereof, and relates to a micron/nano thermocouple manufacturing method which can quickly respond to temperature variation in a tiny area and employs an electrochemical process for corrosion and a vacuum deposition technique to process the thermocouple with the tip curvatureradius ranging from tens of microns to a plurality of nanometers. The thermocouple is composed of three parts, a metal needle point (11) with the micron scale or nanometer scale tip curvature radius is taken as a substrate, an insulating layer (12) is wrapped outside the substrate, the tip of the metal needle point (11) is exposed, and a layer of metal film (13) is arranged on the tip of the insulating layer (12) and the exposed metal needle point (11).