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发明授权
CN101512314B 压力测量变换器 失效 - 权利终止

压力测量变换器
摘要：
公开了一种前部平齐的干式压力测量变换器，其能够在较大的温度范围实现可靠的测量并且包括：不锈钢制成的过程连接(1，1a，1b)，其用于将压力测量变换器固定在测量位置；和压力传感器模块(3，17，29，41)。该压力传感器模块(3，17，29，41)包括不锈钢支架(5，19，31，43)，金属的隔离薄膜(7，23，35，51)利用纯金属连接而前部平齐地插入在该支架中，待测压力(p)在测量操作期间作用于隔离薄膜(7，23，35，51)的外侧。支架(5，19，31，43)利用纯金属连接而前部平齐地插入过程连接(1，1a，1b)。压力传感器模块(3，17，29，41)还包括由支架(5，19，31，43)支承的钛圆盘(7，27，53)，内部装配了硅传感器(15)的蓝宝石托架(13)位于钛圆盘(7，27，53)上。钛圆盘(7，27，53)形成隔离薄膜(23，35，51)，或者与隔离薄膜(23，35，51)机械连接使得隔离薄膜(23，35，51)的偏转引起钛圆盘(27)的相应偏转。
摘要（英）：

Disclosed is a dry front-flush pressure measuring sensor which can take reliable measurements within a great temperature range and comprises a process connection (1, 1a, 1b) that is made of stainless steel and is used for fastening the pressure measuring sensor to a measuring point, and a pressure sensor module (3, 17, 29, 41). Said pressure sensor module (3, 17, 29, 41) is provided with a stainless steel fixture (5, 19, 31, 43), into which a metallic separating membrane is inserted in a front-flush manner by means of a purely metallic connection, a pressure (p) that is to be measured being applied to the external face of said separating membrane. The fixture (5, 19, 31, 43) is inserted in a front-flush manner into the process connection (1, 1a, 1b) by means of a purely metallic connection. The pressure sensor module (3, 17, 29, 41) is also provided with a round titanium plate (7, 27, 53) which is supported by the fixture (5, 19, 31, 43) and to which a sapphire support (13) is appliedthat is fitted with silicon sensors (15) introduced thereinto. The round titanium plate (7, 27, 53) forms the separating membrane (7) or is mechanically connected to the separating membrane (23, 35, 51) in such a way that a deflection of the separating membrane (23, 35, 51) causes the round titanium plate (27) to be deflected in a corresponding fashion.

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