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发明授权
CN101559629B 应用于LED激光切割设备的同轴影像系统 有权 转让

应用于LED激光切割设备的同轴影像系统
摘要：
本发明涉及应用于LED激光切割设备的同轴影像系统应，包括同轴LED点光源模组、45度全反镜、广角CCD模组、第一45度分光镜、小视野高倍率上CCD模组、第二45度分光镜、波长选择镜、LED环形光源、聚焦镜、小视野高倍率下CCD模组，同轴LED点光源模组、广角CCD模组和小视野高倍率上CCD模组三者自上而下并排排布，波长选择镜安装在上CCD模组与聚焦镜之间，LED环形光源紧贴在聚焦镜上，聚焦镜正对于工件，在工件的下方安装小视野高倍率下CCD模组。本发明实现在LED激光切割设备中的同轴实时影像定位功能，广角CCD和小视野高倍率上CCD组合使用实现微米量级的测量精细度，小视野高倍率上CCD和小视野高倍率下CCD便捷切换满足正切、背切、表面粗化和背镀铝晶圆的切割。
摘要（英）：

The invention relates to a coaxial image system applied to an LED laser cutting device, comprising a coaxial LED point light source module, a 45-degree total reflection mirror, a wide-angle CCD module, a first 45-degree spectroscope, a small-vision field high-magnification upper CCD module, a second 45-degree spectroscope, a wavelength selection mirror, an LED ring light source, a focusing lens and a small-vision field high-magnification lower CCD module; the coaxial LED point light source module, the wide-angle CCD module and the small-vision field high-magnification upper CCD module are arrayed in parallel from top to bottom, the wavelength selection mirror is mounted between the CCD module and the focusing lens, the LED ring light source clings to the focusing lens which faces directlytowards a workpiece, the small-vision field high-magnification lower CCD module is mounted below the workpiece. The invention realizes coaxial real-time image positioning function in the LED laser cutting device, combined usage of the wide-angle CCD and the small-vision field high-magnification upper CCD realizes micrometer-grade measurement accuracy, and the convenient switch of the small-visionfield high-magnification upper CCD and the small-vision field high-magnification lower CCD meets the demands of front-cutting, back-cutting, surface coarsening and the cutting of back-aluminized wafer.

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