The invention belongs to the field of material evidence inspection, in particular relates to a method for inspecting paper currency, and uses micro beam XPF to perform non-destructive analysis on an experiment sample. Under the incident micro beam X-ray, a computer software scans a sample by automatically controlling the sample to move continually; characteristic X-ray photons excited by each scanpoint enter an energy detector, and form a spectrum by being processed through an amplifier and a multichannel analyzer; and a two-dimension element scattergram of the sample is obtained after scanning. Finally, the distribution characteristics of element surfaces of a sample paper currency and a known paper currency are compared to obtain an analysis result. The method has the characteristics ofno loss, high sensitivity, accurate result and the like, and has excellent application prospect.