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CN101583896B 样品定位台及其操作方法 有权

样品定位台及其操作方法
摘要：
一种样品定位台(4)，其用于相对于光学检测装置(2)定位待检测的样品(8)。所述样品定位台包括：基本上平面的第一主体(18)，待检测的样品可以携带在该第一主体上；和第二主体(20)，所述第二主体通过在所述第一主体和所述第二主体之间延伸轴承(43，45，47)直接连接到所述第一主体上，所述轴承将所述第一主体相对于所述第二主体的运动限制到与所述第一主体的平面基本上平行的第一平面。还提供驱动系统，其可选择性地以第一模式和第二模式操作，在所述第二模式中，所述驱动系统比第一模式中提供对于通过施加在所述第一主体上的外力导致的第一主体和第二主体在第一平面的相对运动更小的阻力，所述驱动系统接合在所述第一模式和第二模式中。所述台还包括选择器，所述选择器可操作地将操作模式从第一模式改变成第二模式。
摘要（英）：

A sample positioning stage (4) for positioning a sample (8) to be inspected relative to an optical inspection device (2). The stage comprises a first generally planar body (18) on which a sample to beinspected can be carried and a second body (20) directly coupled to the first body via bearings (43,45,47) extending between them which constrain movement of the first body relative to the second body to a first plane that is substantially parallel to the plane of the first body. There is 'also provided a drive system being selectively operable in a first mode and a second mode in which the drivesystem provides less resistance to the relative movement of the first and second bodies in the plane by an external force exerted on the first body than in the first mode, the drive system being engaged in both the first and second modes. The stage further comprises a selector operable to change the mode of operation from the first mode to the second mode.

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