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发明授权
CN101597747B 光学镀膜装置 失效 - 权利终止

光学镀膜装置
摘要：
一种光学镀膜装置，所述光学镀膜装置包括转动轴及多个基板，所述多个基板一端与所述转动轴铰接，所述多个基板以转动轴为中心呈伞状分布，所述光学镀膜装置还包括一个连接于所述转动轴与基板之间的倾角调整装置，所述倾角调整装置包括角度调整件、第一转动件及第二转动件，所述第一转动件及所述第二转动件相铰接，所述角度调整件通过改变所述第一转动件及所述第二转动件之间的角度，改变所述多个基板相对所述转动轴的倾斜角度。本发明所提供的光学镀膜装置，可以通过调整倾角调整装置来调整所述基板相对所述转动轴的倾斜角度，从而校正每次固定时基板相对蒸发源的偏差，以此提高镀膜的良率。
摘要（英）：

The invention discloses an optical coating device comprising a rotation axis and a plurality of substrates, wherein, one end of each of the substrates is hinged with the rotation axis, and the substrates are distributed in an umbrella shape by taking the rotation axis as the centre; the optical coating device also comprises an inclination angle adjusting device connected between the rotation axisand the substrate, wherein, the inclination angle adjusting device comprises an angle adjusting piece, a first rotation piece and a second rotation piece; the first rotation piece is hinged with the second rotation piece; and the angle adjusting piece changes the inclination angle of the substrates corresponding to the rotation axis by changing the angle between the first rotation piece and the second rotation piece. The optical coating device of the invention can adjust the inclination angle of the substrates corresponding to the rotation axis by adjusting an inclination angle adjusting device so as to correct the deviation of the substrate to an evaporation source when fixing is carried out each time, so that the coating yield is improved.

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