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发明授权
CN101617155B 微阀装置 有权 转让

微阀装置
摘要：
一种用于控制流体流动的微阀装置，包括限定具有第一端和第二端的腔室的主体。该第一端与指令压力源连通。该第二端与负载压力源连通。微加工的滑阀被设置在腔室内，位于第一端和第二端之间，以在越过滑阀的压差作用下在第一位置和第二位置之间进行滑动运动，其中，在所述第一位置允许负载压力源和供应压力源之间的流体流动，在所述第二位置允许负载压力源和压力排放口之间的流体流动。该滑阀具有位于第一位置和第二位置中间的闭合位置，其限制负载压力源与供应压力源和压力排放口之间的流体流动。该滑阀可活动地与主体相连接。
摘要（英）：

A microvalve device for controlling fluid flow includes a body defining a chamber having first and second ends. The first end is in communication with a source of command pressure. The second end in communication with a source of load pressure. A micromachined spool valve is disposed in the chamber between the first and second ends for sliding movement by differential pressure across the spool valve between a first position in which allows fluid flow between the source of load pressure and a source of supply pressure and a second position which allows fluid flow between the source of load pressure and a pressure vent. The spool valve has a closed position intermediate the first position and the second position which restricts fluid flow between the source of load pressure and both the source of supply pressure and the pressure vent. The spool valve is moveably connected to the body.

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