The invention provides a floating device (1) capable of highly efficiently ensuring levelness of the substrate (W), and avoiding interference between one end of the substrate (W) and the floating units with the proviso that the floating performance is ensured and the enlarged substrate (W) are carried. In the floating device (1), a transport unit (11), that transports a substrate (W) in the transport direction, is provided to a support frame (3), and multiple float units (37) are provided to the support frame (3), along the transport direction and a transport width direction. Each float unit (37) comprises the float unit body (39) that has an air-jet nozzle (41) at the upper surface thereof, and a float unit leg (43) that is provided at the center of the lower surface of the float unit body (39) and has an interior portion, communicating with an interior portion of the float unit body (39). The maximum outside dimension of the float unit leg (43), in the transport direction, is smaller than the maximum outside dimension of the float unit body (39), in the transport direction.