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CN101681628A 悬浮臂用基板、其制备方法、磁头悬浮臂和硬盘驱动器 失效 - 权利终止

悬浮臂用基板、其制备方法、磁头悬浮臂和硬盘驱动器
摘要：
悬浮臂用基板(10)具备金属基板(1)、在金属基板(1)上形成的绝缘层(2)、在绝缘层(2)上形成的布线层(3)、和覆盖布线层(3)的覆盖层(4)。绝缘层(2)的材料和覆盖层(4)的材料由不同材料构成，两者的吸湿膨胀系数在3×10 -6 /％RH～30×10 -6 /％RH的范围内，两者的吸湿膨胀系数之差在5×10 -6 /％RH以下的范围内。
摘要（英）：

Disclosed is a substrate (10) for suspension, which comprises a metal substrate (1), an insulating layer (2) formed on the metal substrate (1), a wiring layer (3) formed on the insulating layer (2), and a cover layer (4) covering the wiring layer (3). The material of the insulating layer (2) is different from the material of the cover layer (4), and their coefficients of moisture-absorption expansion are within the range from 3*E10<-6>/%RH to 30*E10<-6>/%RH. The difference between the coefficients of moisture-absorption expansion of these materials is not more than 5*E10<-6>/%RH.

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