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发明公开
CN101782530A 薄膜表面微观缺陷扩展的光学检测方法及实施装置 无效 - 撤回

薄膜表面微观缺陷扩展的光学检测方法及实施装置
摘要：
本发明涉及图像处理、微纳观结构的力学检测和实验力学，具体讲涉及薄膜表面微观缺陷扩展的光学检测方法。本发明的目的在于提供一种用于检测脱沾屈曲边界的扩展过程的技术方案，本发明采用的技术方案是，薄膜表面微观缺陷扩展的光学检测方法及实施装置，包括、光学显微系统、图像采集装置、输入端、存储装置和处理器，处理器：用于在程序控制下处理表示图像的数据集，从而通过操作来确定该图像中的薄膜/基底结构中的脱沾屈曲破坏的边界以及边界的扩展，输出端：用于显示脱沾屈曲破坏边缘扩展的检测结果。本发明主要应用于微纳观结构的力学检测。
摘要（英）：

The invention relates to image processing, the mechanics detection of microcosmic structures and experimental mechanics, in particular to an optical detection method for the microcosmic defect expansion of film surfaces. The invention aims to provide a technical scheme for detecting the expansion processes of buckling boundaries. The invention has the technical scheme that the implementing device of the optical detection method for the microcosmic defect expansion of the film surfaces comprises an optical microscope system, an image collecting device, an input end, a storing device and a processor, wherein the processor is used for processing datasets representing images under the control of a program so as to determine the boundaries destroyed by buckling in the film/base structures of the images and the expansions of the boundaries through operation, and the output end is used for displaying the detection results of the expansion of the buckling-destroyed boundaries. The invention is mainly applied to the mechanics detection of the microcosmic structures.

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