The invention relates to an antimagnetic particle three-dimensional control device based on the MEMS technology in the life science technical field, comprising paramagnetism solution, a chamber, a permanent magnet and a chip; wherein the chip comprises a substrate, a load platform, a coil array and a spring, wherein the substrate is provided with the coil array, the load platform and the spring in a photoetching way, one end of the spring is fixed on the substrate, the other end is connected with the load platform, the permanent magnet is adhered on the load platform, the chamber is internally provided with the paramagnetism solution, and the chamber is placed on the permanent magnet. The magnetic source driving of the invention adopts flexible electromagnetic drive mode, structure is simple, MEMS process is adopted, and the device can be made into a portable on-chip system with low cost.