The invention relates to a cleaning device, in particular to a cleaning device for cleaning a sheet attracting table on semiconductor special equipment. The device comprises a spraying system, a labyrinth seal system and a hairbrush rod system. A hairbrush rod is arranged on a hairbrush shaft after passing through a hairbrush cover; the hairbrush shaft is sleeved with a seal ring, a bearing, an inner space ring, an outer space ring, a bearing, an end cover and a bearing lock nut in sequence; the bearing lock nut is fixed on the hairbrush shaft through screw threads; a gland and the end cover are fixed on a bearing seat; two water injection pipes are arranged on the hairbrush cover. The hairbrush rod is evenly distributed with dense nylon hairbrushes; the seal ring and the gland form labyrinth seal; the hairbrush cover is provided with the two water injection pipes; the position that each water spray pipe is opposite to the hairbrush rod is provided with dense small-diameter water injection nozzles; and the bottom of the hairbrush cover is provided with a water discharge slot. The invention has the characteristics of delicate and compact structure, simple installation, convenient application and low cost.