The invention discloses a deposition clamp of a film solar cell, belonging to the technical field of solar cells. The deposition clamp is mainly technically characterized in that an electrode plate assembly has insulation protection, the rectangular end surface of a signal feed-in assembly with a flat waist contacts with a signal feed-in hole which is arranged in a dented rectangular surface in aback center region of a cathode plate for feeding in an RF (Radio-Frequency)/VHF (Very High Frequency) power supply signal, an anode plate is grounded, and a shielded cover of the cathode plate is provided with through holes and insulated from the cathode plate. The invention has the effects of overcoming the loss caused by distance during one-point feeding in or multi-point feeding by feeding infrom the central surface of the plates, obtaining the large-area stable discharge of an even electric field under the driving of the RF/VHF power supply, effectively eliminating standing wave and conductor skin effects, improving the yield, and decreasing the cost.