The invention discloses a method for levelling metal plate with stress deformation by utilizing vacuum annealing. The metal plate required to be levelled is placed in a fixture comprising an upper cover plate and a lower cover plate, a sealed air pocket is arranged on the metal plate, the elastic thin wall of the air pocket is contacted with the metal plate, the air pocket is fastened onto the metal plate required to be levelled, and the metal plate is placed into a vacuum annealing furnace, vacuumizing, heating and annealing are carried out, and levelling on the metal plate is carried out after annealing is finished. The method of the invention changes the levelling method from local deformation into global deformation while the metal plate is in uniform stress after yield stress is reduced, thus finishing levelling in one step and improving efficiency and accuracy of levelling; and meanwhile the method of the invention combines 'levelling' and 'annealing' processes, thus shortening production period and reducing production cost.