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发明授权
CN101911252B 载置台装置、处理装置以及温度控制方法 有权

载置台装置、处理装置以及温度控制方法
摘要：
本发明提供一种载置台装置、处理装置以及温度控制方法。载置台装置具备：载置台(26)，其用于在上表面载置被处理体(W)；加热机构(30)，其具有在载置台(26)上呈同心状被划分的多个加热区域的每个区域内设置的多个加热器部；腿部(28)，其连接于载置台(26)的中心部，在竖立的状态下对上述载置台水平地进行支承；温度测量部(38)，其与多个加热区域内的最内周的加热区域对应地设置；电源控制部(42)，其基于温度测量部(38)的测量值对最内周的加热器部的温度进行反馈控制，并且利用对最内周的加热器部的安全供给电力比，来控制向其他的加热器部供给的电力，其中该安全供给电力比是以使加热区域间的温度差处于载置台(26)不破损的范围的方式决定的。
摘要（英）：

A placing table apparatus is provided with a placing table (26) for placing a body (W) to be processed on an upper surface; a heating mechanism (30) having a plurality of heater sections respectively arranged in a plurality of heating zones concentrically divided on the placing table (26); a leg section (28), which is connected to the center portion of the placing table (26) and horizontally supports the placing table in an upright state; temperature measuring sections (38), which are arranged corresponding to the heating zone on the innermost circumference in the heating zones; and a power supply control section (42), which controls the temperature of the heater section on the innermost circumference through feedback, based on a measurement value obtained from the temperature measuring sections (38), and controls power supply to other heater sections, at a safe power supply rate for the heater section on the innermost circumference. The safe power supply rate is determined so that a temperature difference between the heater sections on the innermost circumference is within a range where a placing table (26) does not break.

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