The invention relates to a reeling, welding and knurling process for inner and outer surfaces of a sputtered tantalum ring, which comprises the following steps of: preparing a tantalum bar; reeling; welding two ends of the tantalum bar; performing heat treatment, shaping, performing knurling on the inner and outer surfaces, turning circular arcs on side edges, and performing knurling on the circular arcs on the side edges; and cutting off welded junctions. Through the process, uniform and consistent 80TPI raised lozenge patterns can be formed on the inner and outer surfaces and side edges of the sputtered open tantalum ring so as to meet the use requirement of semiconductor users.