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发明授权
CN102013387B 用于刻蚀设备的金属盘绕圈及其组装方法 失效 - 权利终止

用于刻蚀设备的金属盘绕圈及其组装方法
摘要：
本发明提供一种用于刻蚀设备的金属盘绕圈，包括中部件和下部件，所述中部件具有进气口，所述下部件具有进气管，所述下部件的进气管的管口与所述中部件的进气口相配合，并且所述下部件的进气管管口处设置有第一定心套。本发明还提供一种用于刻蚀设备的金属盘绕圈的组装方法，包括在所述中部件设置进气口，在所述下部件设置进气管，使所述下部件的进气管的管口与所述中部件的进气口相配合，并且在所述下部件的进气管管口处设置第一定心套。本发明通过在与中部件的进气口相配合的下部件的进气管管口处设置第一定心套，使得金属盘绕圈的中部件和下部件在组装过程中，能够很容易地将中部件的进气口与下部件的进气管的轴线对准，这样使得中部件的进气口与下部件的进气管的管口四周留有均匀的间隙，使得进入刻蚀腔体中的工艺气体的气流变得均匀、稳定，优化了实际的工艺过程。
摘要（英）：

The invention provides a metal disc winding for etching equipment, comprising an intermediate component and a lower component, wherein the intermediate component has an air inlet, the lower component has an intake-tube, an orifice of the intake-tube of the lower component is matched with the air inlet of the intermediate component, and a first centering sleeve is arranged at the orifice of the intake-tube of the lower component. The invention also provides an assembly method of the metal disc winding for etching the equipment, comprising the steps of arranging the intake-tube on the lower component so as to lead the orifice of the intake-tube of the lower component to match the air inlet of the intermediate component, and arranging the first centering sleeve at the orifice position of the intake-tube of the lower component. The invention arranges the first centering sleeve at the orifice position of the intake-tube of the lower component, which is matched with the air inlet of the intermediate component, so that the air inlet of the intermediate component and the axial line of the intake-tube of the lower component are easily aligned in the assembly process of the intermediate component and the low component of the metal disc winding and uniform gaps are reserved around the orifice of the intake-tube of the lower component and around the air inlet of the intermediate component, so that air current of process gas entering an etching cavity are unified and stabilized and the actual process can be optimized.

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