The invention provides a method for detecting defects of a curve metal wire by using a charged particle beam. The method comprises the following steps of: connecting the same electric potentials to the head end and the tail end of the curve metal wire; horizontally detecting a metal straight line part of the curve metal wire by using the charged particle beam; determining the types and position ranges of the defects by making a current change curve; and longitudinally detecting and analyzing the current change curve to determine the exact positions of the defects of the curve metal wire. By the method, the defects are detected by using a charged electron beam or a charged ion beam, so that the detected spatial resolution is improved from a micron level to a nanometer level and is basically not influenced by materials with the defects, slight resistance changes caused by tiny defects can be detected, the detection time of the defects of the curve metal wire is shortened by the horizontal detection, and the defect analysis efficiency is greatly improved.