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发明公开
CN102059576A 双轴直线移动微驱动装置 失效 - 权利终止

双轴直线移动微驱动装置
摘要：
本发明公开了一种双轴直线移动微驱动装置，包括在Z向滑座上表面设有安装座A，安装座A内固定有Z向微致动器，Z向微致动器与Z向微动台连接，Z向微动台向上与X向滑座连接，Z向滑座的安装座A两侧设有Z向导轨条，每侧的一个Z向导轨条上设有两个Z向导轨块，Z向导轨块固定安装在X向滑座的下表面；X向滑座的上表面设有安装座B，安装座B内固定有X向微致动器，X向微致动器与X向微动台连接，X向微动台向上与XZ双轴运动平台连接，在X向滑座上表面安装座B两侧设有两个X向导轨条，每个X向导轨条上设有两个X向导轨块，X向导轨块固定安装在XZ双轴运动平台的下表面。本发明的装置，误差传递小进给精度高，平台姿态误差小。
摘要（英）：

The invention discloses a biaxial linear moving micro driving device. A mounting base A is arranged on the upper surface of a Z-direction sliding seat; a Z-direction micro actuator is fixed in the mounting base A and is connected with a Z-direction micropositioner; the Z-direction micropositioner is upwards connected with an X-direction sliding seat; Z-direction guide rail strips are arranged on two sides of the mounting base A of the Z-direction sliding seat; two Z-direction guide rail blocks are arranged on one Z-direction guide rail strip on each side of the mounting base A and are fixedly arranged on the lower surface of the X-direction sliding seat; a mounting base B is arranged on the upper surface of the X-direction sliding seat; an X-direction micro actuator is fixed in the mounting base B and is connected with an X-direction micropositioner; the X-direction micropositioner is upwards connected with an XZ biaxial moving platform; two X-direction guide rail strips are arranged on two sides of the mounting base B on the upper surface of the X-direction sliding seat; and two X-direction blocks are arranged on each X-direction guide strip and are fixedly arranged on the lower surface of the XZ biaxial moving platform. The device has the advantages of small transmission error, high feeding precision and small platform attitude error.

公开/授权文献
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