利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN102190302A 无裂纹多晶硅棒的生产方法 有权

无裂纹多晶硅棒的生产方法
摘要：
本发明涉及无裂纹多晶硅棒的生产方法。本发明尤其涉及一种通过从气相中沉积到细棒上生产多晶硅棒的方法，其中，在电极上方和/或棒对的桥下方引入一个或多个沉积条件下具有的电阻率低于多晶硅的材料构成的盘。本发明的方法获得的棒无裂纹并且无缺损的棒长度显著增加。
摘要（英）：

The invention relates to a method for producing crack-free polycrystalline silicon rods. Especially, the invention relates to a method for producing polycrystalline silicon rods by deposition from the gas phase on a thin rod, wherein one or a plurality of disks consisting of a material having a lower electrical resistivity than the polycrystalline silicon under deposition conditions are introduced above the electrodes and/or below the bridge of the rod pair. The rod has no crack and the length of the crack-free rod is obviously increased.

公开/授权文献
0/0