利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN102200432A 非球面物体测量方法和设备 无效 - 撤回

非球面物体测量方法和设备
摘要：
本发明公开了一种非球面物体测量方法和设备。为了获得非球面透镜(9)的第一和第二透镜表面(91，92)的几何数据，第一和第二干涉仪(1A，1B)分别测量来自第一表面和第二表面的反射波前。第一和第二透镜表面的几何数据每一个都由Zernike多项式近似表示，以确定Zernike多项式的第二和第三项系数(Z1，Z2)的值。根据所述几何数据计算第一透镜表面相对于第一干涉仪的第一光轴(L1)的顶点偏心值和第二透镜表面相对于第二干涉仪的第二光轴(L2)的顶点偏心值。第一和第二透镜表面的第一和第二系数以及顶点偏心值用于计算第一透镜表面相对于第一光轴的位移量和倾斜量以及第二透镜表面相对于第二光轴的位移量和倾斜量，以确定第一透镜表面相对于第二透镜表面的轴偏和倾斜。
摘要（英）：

To acquire geometric data of first and second lens surfaces (91, 92) of an aspheric lens (9), first and second interferometers (1A, 1B) measure reflection wave fronts from the first and second surfaces respectively. The geometric data of the first and second lens surfaces are each approximated with a Zernike polynomial, to determine the values of coefficients (Z1, Z2) of the second and third terms of the Zernike polynomial. On the basis of the geometric data, the value of apex decentricity of the first lens surface to a first optical axis (L1) of the first interferometer and the value of apex decentricity of the second lens surface to a second optical axis (L2) of the second interferometer are calculated. The first and second coefficients and the values of apex decentricity of the first and second lens surfaces are used to calculate shift and tilt amounts of the first lens surface to the first optical axis and shift and tilt amounts of the second lens surface to the second optical axis, to determine decentration and tilt of the first lens surface relative to the second lens surface.

0/0