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发明公开
CN102405124A 激光加工方法 有权

激光加工方法
摘要：
通过使聚光点对准加工对象物(1)的内部、沿着切断预定线(5a)照射激光(L)，而形成改质区域(7a)。其后，通过沿着切断预定线(5a)再度照射激光(L)，在加工对象物(1)中在表面(3)与第1改质区域(7a)之间形成改质区域(7b)，并且，产生从改质区域(7b)到表面(3)的龟裂(Cb)。因此，能够使加工对象物(1)在形成改质区域(7a)时所产生的弯曲的力(F1)，利用龟裂(Cb)而解除并相抵消。其结果，能够抑制加工对象物(1)的弯曲。
摘要（英）：

The laser beam (L) is irradiated along an intended cutting line (5a) onto a convergence point within an object (a) to be machined to form an affected area (7a). After that, the laser beam (L) is irradiated again along the intended cutting line (5a) to form an affected area (7b) between a surface (3) of the object (1) to be machined and the first affected area (7a) and produce a crack (Cb) extending from the affected area (7b) to the surface (3). Therefore, it is possible to release and cancel a deflecting force (F1) which is produced when the affected area (7a) is formed in the object (1) to be machined by the crack (Cb). As a result, the occurrence of the deflection of the object (1) to be machined can be prevented.

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