利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN102496538A 用于毛细管极紫外光刻光源的放电电极 无效 - 撤回

用于毛细管极紫外光刻光源的放电电极
摘要：
用于毛细管极紫外光刻光源的放电电极，属于极紫外光刻光源技术领域。它解决了在极紫外光刻光源中，需要通过改变毛细管的长度的方式来实现两个主脉冲电极之间的距离的改变的问题。它包括长度可调的主脉冲电极段、预脉冲电极段和放电电极段，预脉冲电极段为圆筒形，预脉冲电极段的一端固定连接放电电极段的一端，放电电极段的另一端的端面为凹球面；主脉冲电极段的一端从预脉冲电极段的另一端插入其内部，并与预脉冲电极段电连接，主脉冲电极段的另一端露在预脉冲电极段外部，且其末端具有尖端，所述放电电极段呈柱状，放电电极段的截面半径的范围为0.2mm～3.5mm。本发明作为一种极紫外光刻光源的放电电极。
摘要（英）：

The invention, which belongs to the extreme ultraviolet photoetching light source technology field, relates to a discharge electrode used for a capillary extreme ultraviolet photoetching light source. Therefore, a problem that it is needed to use a mode of changing the length of a capillary to realize a change of a distance between two main pulse electrodes in an extreme ultraviolet photoetching light source can be solved. The discharge electrode comprises a main pulse electrode segment with an adjustable length, a prepulse electrode segment and a discharge electrode segment. The prepulse electrode segment is in a cylindrical shape; one end of the prepulse electrode segment is fixedly connected with one end of the discharge electrode segment; and the end surface of the other end of the discharge electrode segment is a concave spherical surface. One end of the main pulse electrode segment is inserted into the prepulse electrode segment from the other end of the prepulse electrode segment as well as is electrically connected with the prepulse electrode segment; the other end of the main pulse electrode segment is exposed outside the prepulse electrode segment; and the end of the main pulse electrode segment has a tip. And the discharge electrode segment is in a columnar shape; and a range of a section radius of the discharge electrode segment is from 0.2mm to 3.5 mm. According to the invention, the provided discharge electrode is used as one for extreme ultraviolet photoetching light source.

0/0