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CN102650604A 洁净间用气流组织测试方法及装置系统 无效 - 驳回

洁净间用气流组织测试方法及装置系统
摘要：
本发明公开一种洁净间用气流组织测试方法及装置系统，为解决现有可视化测试方法精度差等缺陷而设计。本发明洁净间用气流组织测试方法用热成像设备探测样品气体在洁净间形成样品气流，所述样品气体为与环境气体存在温差的液氮、干冰或水蒸汽等气体。本发明洁净间用气流组织测试装置系统包括样品气体发生器和热成像设备，热成像设备能连续探测样品气体的空间位置并显示在显示器上。本发明洁净间用气流组织测试方法测试结果更加准确，避免给洁净间带入污染；探测设备技术成熟，测试精度高。本发明洁净间用气流组织测试装置系统是用样品气体发生器和温度探测装置，提高了探测精度，扩大了探测范围。
摘要（英）：

The invention discloses an airflow distribution testing method and apparatus system for a clean room, and is designed to overcome the defects of the existing visual testing method such as low precision. According to the airflow distribution testing method for the clean room, sample airflow formed by a sample gas in the clean room is detected by a thermal imaging device, and the sample gas is liquid nitrogen, dry ice, water vapor or other gases with temperature difference from the ambient gas. The airflow distribution testing apparatus system for the clean room comprises a sample gas generator and the thermal imaging device, wherein the thermal imaging device can continuously detect the spatial position of the sample gas and display the spatial position of the sample gas on a display. By adopting the airflow distribution testing method for the clean room, testing results are more accurate, and the clean room can be prevented from being polluted. The detection device is mature technically, and the testing accuracy is high. The sample gas generator and the temperature detection device are used in the airflow distribution testing apparatus system for the clean room, the detection accuracy is improved, and the scope of detection is enlarged.

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