The invention discloses a high pulse repetition frequency ArF (argon fluoride) excimer laser pulse energy control system. The system comprises a pyroelectric detector, an operational amplifying circuit, a peak holding circuit, a main control circuit and a PI (proportional integral) control algorithm; the main controller of the main control circuit is a singlechip; the pyroelectric detector converts an optical signal into an electric pulse signal; the electric pulse signal is amplified by the operational amplifying circuit; after the peak holding circuit performs peak holding tracking, the amplified electric pulse signal is converted into a digital signal by an A/D (analogue/digital) conversion module and then is input the singlechip; the singlechip utilizes the PI algorithm to calculate the reference voltage digital signal required by the next pulse discharging; after the reference voltage digital signal is converted into analogue quantity through a DA (digital/analogue) module, the analogue quantity acts on the high voltage direct current power supply or controllable resonant charging module in an all-solid pulse power supply used by a high pulse repetition frequency ArF excimer laser. The PI voltage adjusting algorithm disclosed by the invention can be used for improving the control prevision and reducing the operation cost of the high pulse repetition frequency ArF excimer laser.