The invention provides equipment for vacuum sublimation purification of a small organic molecule material. The equipment comprises a quartz sublimation pipe, a vacuumizing device for vacuumizing the quartz sublimation pipe, a film thickness detector and a heating device, wherein the film thickness detector is capable of detecting the diffusion rate of the small organic molecule material after sublimation in the quart sublimation pipe and comprises a probe capable of contacting small organic molecules, and a signal processor which is connected with the probe and used for sending out a diffusion rate signal; and the heating device is used for heating each temperature zone of the quartz sublimation pipe and adjusting according to the diffusion rate. The equipment provided by the invention realizes effective control on the vacuum sublimation purification process of the small organic molecule material, and further realizes reduction of pollution and waste while improving the purification speed and the purity and quality of the material. The invention also provides a process for the vacuum sublimation purification of the small organic molecule material, which is implemented by the equipment for the vacuum sublimation purification of the small organic molecule material provided by the invention.