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发明公开
CN103234692A 一种传感型真空度测量装置 无效 - 撤回

一种传感型真空度测量装置
摘要：
本发明公开了一种传感型真空度测量装置，包括壳体，所述壳体的两轴向端面上分别设有真空连接口及仪表连接座；所述壳体内设有真空室，该真空室中安装有半导体敏感元件，所述半导体敏感元件与仪表连接座呈桥路电路连接。本发明利用半导体敏感元件在不同的真空度条件下的散热变化，得出相应的桥路电阻变化，由此测量出精确的真空度，不仅电荷传输过程中有非常高的灵敏度，而且工艺简单、抗污染性能好。
摘要（英）：

The invention discloses a sensing type vacuum degree measuring device which comprises a shell. A vacuum interface and an instrument connecting seat are arranged on two axial end faces of the shell respectively, a vacuum chamber is arranged in the shell, and a semiconductor-sensitive element is mounted in the vacuum chamber and is in bridge circuit connection with the instrument connecting seat. By utilizing heat radiating changes of the semiconductor-sensitive element under different vacuum degrees, corresponding bridge circuit resistance changes are obtained, and then vacuum degree is accurately measured. The sensing type vacuum degree measuring device is quite high in sensitivity during charge transmission, simple in process and good in anti-pollution performance.

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