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CN103430625A 蒸镀装置、蒸镀方法和有机EL显示装置的制造方法 有权

蒸镀装置、蒸镀方法和有机EL显示装置的制造方法
摘要：
蒸镀装置(1)通过蒸镀处理在被成膜基板(40)上形成规定图案的发光层(47)，蒸镀装置(1)包括：喷嘴(13)，其形成有在进行蒸镀处理时向被成膜基板(40)射出形成发光层(47)的蒸镀颗粒(17)的多个射出口(16)；和多个限制板(20)，该多个限制板(20)配置于喷嘴(13)与被成膜基板(40)之间，对从多个射出口(16)射出的蒸镀颗粒(17)相对于被成膜基板(40)的入射角进行限制，喷嘴(13)包括：在配置被成膜基板(40)的一侧的面具有开口部(14c)的容器形状的喷嘴主体(14b)；和多个块体(15)，该多个块体(15)覆盖开口部(14c)，相互分离，且分别形成有多个射出口(16)。由此，形成高精细的蒸镀膜图案。
摘要（英）：

By means of vapor deposition processing, this vapor deposition device (1) forms a light-emitting layer (47) having a predetermined pattern on a substrate (40) at which a film is to be formed, and is provided with: a nozzle (13) to which a plurality of projecting openings (16) are formed that project vapor deposition particles (17) to become the light-emitting layer (47) towards the substrate (40) at which a film is to be formed during vapor deposition processing; and a plurality of restriction plates (20) that are disposed between the nozzle (13) and the substrate (40) at which a film is to be formed and that restrict the angle of incidence with respect to the substrate (40) at which a film is to be formed of the vapor deposition particles (17) projected from the plurality of projection openings (16). The nozzle (13) is provided with: a container-shaped nozzle body (14b) having openings (14c) at the surface on the side at which the substrate (40) at which a film is to be formed is disposed; and a plurality of blocks (15) that cover the openings (14c), are spaced from each other, and respectively have the plurality of projecting openings (16) formed thereto. As a result, a high-precision vapor deposition film pattern is formed.

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