The invention discloses an APCVD on-line low-radiation film coating waste gas treatment device. The device comprises a variable frequency waste gas fan (1), a combustion furnace (2), a high temperature electrostatic dust-removing device (3), a scrubbing tower (4), a gravity dehydration device (5) and an induced draft fan (6), wherein the variable frequency waste gas fan (1), the combustion furnace (2), the high temperature electrostatic dust-removing device (3), the scrubbing tower (4), the gravity dehydration device (5) and the induced draft fan (6) are sequentially communicated through pipelines. All the waste gas treatment units are matched orderly to treat high-temperature and acid film coating waste gas containing dust and fluorine. A waste liquid outlet of the scrubbing tower (4) and a water outlet of the gravity dehydration device (5) are communicated with a water return pool (9). The water return pool (9) and a liquid supply pool (8) form a circulation path through an infusion pump (13) and a cooling tower (14). Alkali liquor which is not completely reacted in the scrubbing tower (4) is recycled, and waste liquid which is completely reacted is pumped to a pressure filter (16) through a slime pump (15). By means of solid-liquid separation of the pressure filter (16), filter liquid enters a waste water pool (10) and then is injected to the combustion furnace (2) through a waste water pump (17) to be combusted, filter residues can be recycled, and therefore circulation purification of waste water produced in the film coating waste gas treatment process and pollution-free discharge are achieved.