The invention provides an RCM analysis method. The method comprises the following steps: the function-level failure result is analyzed, the RTF judgment is performed, and criticality classification is performed on devices according to the analysis result to generate a list of devices need to be subjected to maintenance requirement analysis; the failure mode, failure effect and failure result analysis is performed on devices in the list of devices need to be subjected to maintenance requirement analysis; operation frequencies and operation conditions of the devices are determined; and a corresponding maintenance strategy is selected according to a default decision logic by combining with a maintenance strategy template database, the criticality classification, the failure result, the operation frequencies and the operation conditions. By implementing the method of the invention, the shortage that the original RCM analysis method depends too much on the analyst experience and only depend on the experience feedback can be overcome, technical supports can be provided for determining device maintenance requirements and generating and optimizing the maintenance strategy, the system/device operation reliability can be improved, and the device operation maintenance cost can be reduced.