The invention provides vacuum evaporation equipment for inorganic material, which comprises a vacuum evaporation chamber and an automatic control system. In the vacuum evaporation equipment provided by the invention, each module collects various parameter signals in the vacuum evaporation chamber and sends various parameter signals to a main control machine; the main control machine processes the various received parameter signals according to various preset parameters to obtain feedback signals and feeds back the feedback signals to corresponding control modules; the corresponding control modules carry out automatic regulation and control on corresponding parts according to the corresponding feedback signals so as to achieve automatic control on inorganic material vacuum coating. The vacuum evaporation equipment for the inorganic material not only saves a great quantity of labor, but also, more importantly, can achieve effective monitoring on the inorganic material vacuum evaporation process and achieves improvement on the inorganic material vacuum evaporation accuracy and quality, and speed increasing.