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发明公开
CN104101588A 一种集成海水叶绿素微流芯片传感器及制作方法 无效 - 驳回

一种集成海水叶绿素微流芯片传感器及制作方法
摘要：
一种增强抗干扰能力、提高荧光的探测效率的集成海水叶绿素微流芯片传感器。技术方案是：其特征是由Si-PIN探测器（1）、6H-SiC/ITO/SiO2层（3）、反射和焊接层（4）、LED芯片（5）、玻璃板（6）、PDMS微流通道（7）和镀膜反射镜（8）组成，其中，所述的Si-PIN探测器（1）、6H-SiC/ITO/SiO2层（3）、反射和焊接层（4）、LED芯片（5）、玻璃板（6）、PDMS微流通道（7）、和镀膜反射镜（8）按从下到上的顺序连接。本发明还公开了其制作方法。
摘要（英）：

An integrated seawater chlorophyll microfluidic chip sensor capable of enhancing the anti-interference ability and improving the fluorescence detection efficiency adopts the technical scheme that the integrated seawater chlorophyll microfluidic chip sensor is characterized by consisting of a Si-PIN detector (1), a 6H-SiC/ITO/SiO2 layer (3), a reflecting and welding layer (4), an LED chip (5), a glass plate (6), a PDMS microfluidic channel (7) and a coated reflector (8), wherein the Si-PIN detector (1), the 6H-SiC/ITO/SiO2 layer (3), the reflecting and welding layer (4), the LED chip (5), the glass plate (6), the PDMS microfluidic channel (7) and the coated reflector (8) are sequentially connected from bottom to top. The invention also discloses a method for manufacturing integrated seawater chlorophyll microfluidic chip sensor.

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