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CN104218146A 薄膜PZT结构的粘合增强 无效 - 驳回

薄膜PZT结构的粘合增强
摘要：
本申请公开了薄膜PZT结构的粘合增强。一种例如用于盘驱动器的微型致动器，包括基底，基底上的夹层结构，以及基底和夹层结构上方的钝化层。该夹层结构具有由贵金属形成的下电极，压电层，以及由贵金属形成的上电极。该微型致动器进一步具有位于下电极和钝化层之间的下粘合层以及位于上电极和钝化层之间的上粘合层中的一个或两个。即该微型致动器可仅具有下粘合层，仅具有上粘合层，或同时具有下粘合层和上粘合层。
摘要（英）：

A microactuator (160), for example for a disc drive, comprising a substrate (168), a sandwich structure (162, 164, 166) on the substrate, and a passivation layer (172) over the substrate and the sandwich structure. The sandwich structure has a bottom electrode (164) formed from noble metal, a piezoelectric layer (162), and a top electrode (166) formed from noble metal. The microactuator further has one or both of a bottom adhesion layer present between the bottom electrode and the passivation layer, and a top adhesion layer present between the top electrode and the passivation layer. That is, the microactuator may have only the bottom adhesion layer, only the top adhesion layer, or both the bottom adhesion layer and the top adhesion layer.

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