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发明授权
CN104235497B 具有改进的空气清除能力的微阀 有权

具有改进的空气清除能力的微阀
摘要：
本发明涉及具有改进的空气清除能力的微阀。一种微阀，包括基板，基板具有限定出致动器空腔的表面。排气沟槽从致动器空腔的具有终端区域的第一空腔部分向致动器空腔的具有可以从微阀中排出气体的结构的第二空腔部分延伸。盖板包括设置有致动器空腔的表面，致动器空腔包括具有终端区域的第一空腔部分和具有可以从微阀中排出气体的结构的第二空腔部分。中间板包括布置在致动器空腔中的可移位构件、可移位构件在闭合位置和打开位置之间移动，在闭合位置，可移位构件防止经由微阀的流体连通，在打开位置，可移位构件不再防止经由微阀的流体连通。
摘要（英）：

A microvalve includes a base plate having a surface defining an actuator cavity. A venting groove extends from a first cavity portion of the actuator cavity having a dead end region to a second cavity portion of the actuator cavity having a structure that can vent air from the microvalve. A cover plate includes a surface having an actuator cavity provided therein that includes a first cavity portion having a dead end region and a second cavity portion having a structure that can vent air from the microvalve. An intermediate plate includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve.

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