The invention discloses a method for preventing an LED chip electrode from generating pits during aluminum evaporation. The method includes the steps that an aluminum coating with the thickness being N is divided into n part layers for evaporation respectively, wherein the N is equal to a sum of N1, N2 ... and Nn, and the time interval between every two part layers during evaporation ranges from 5 seconds to 60 seconds until evaporation on the whole aluminum coating is completed; or an aluminum coating with the thickness being N is divided into n part layers for evaporation respectively, wherein N is equal to a sum of N1, N2 ... and Nn, the N1, the N2 ... and the Nn are equal, the time interval between every two part layers during evaporation is 10 seconds until the evaporation on the whole aluminum coating is completed; the time intervals of the part layers during evaporation are equal. The evaporation is carried out at the rate being 5-25A/s under the condition that the temperature ranges from 20 DEG C to 50 DEG C. The method has the advantages that operability is high, and aluminum particles cannot grow into large aluminum particles; reliability is high, and influences on the yield are avoided.