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Invention Grant
CN104272450B 静电夹具和静电夹具的制造方法 有权

静电夹具和静电夹具的制造方法
Abstract:
本发明提供一种静电夹具和静电夹具的制造方法，其不存在采用粘接剂的场合的缺陷，并且设计自由度高。一种静电夹具(1)，包括：基材部(2)，其构成夹具主体；第1绝缘层(3)，其由形成于基材部(2)的表面(2a)上的喷镀覆膜构成；加热部(4)，其由导电体构成，该导电体通过涂敷导电性糊的方式形成于第1绝缘层(3)的表面(3a)上；第2绝缘层(5)，其由按照覆盖加热部(4)的方式形成于第1绝缘层(3)的表面(3a)上的喷镀覆膜构成；电极部(6)，其通过喷镀于第2绝缘层(5)的表面(5a)上形成；以及电介体层(7)，其由按照覆盖电极部(6)的方式形成于第2绝缘层(5)的表面(5a)上的喷镀覆膜构成，该静电夹具(1)不采用粘接剂，降低了加热部(4)的体积电阻率。
Abstract(English):

An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.

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